Patent Assignment
Reel/Frame 038967/0416
Assignment of Assignor's Interest
Recorded: 2016-06-21
Pages: 6
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, and Storage Medium
Application:
15/187,300 →
Publication:
US 2016/0376699
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.