Patent Assignment
Reel/Frame 038972/0373
Assignment of Assignor's Interest
Recorded: 2016-06-21
Pages: 5
Assignors
NAGAHARA, SEIJI
Executed: 2016-06-01
SHIRAISHI, GOUSUKE
Executed: 2016-06-02
SHIMURA, SATORU
Executed: 2016-06-02
YOSHIHARA, KOUSUKE
Executed: 2016-06-02
KAWAKAMI, SHINICHIRO
Executed: 2016-06-02
TOMONO, MASARU
Executed: 2016-06-03
TAGAWA, SEIICHI
Executed: 2016-06-20
OSHIMA, AKIHIRO
Executed: 2016-06-20
Assignees
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
OSAKA UNIVERSITY
1-1, YAMADAOKA, SUITA-SHI, OSAKA, 565-0871, JAPAN
Covered Property
(1)
Substrate Treatment System