Patent Assignment
Reel/Frame 039031/0884
Assignment of Assignor's Interest
Recorded: 2016-06-28
Pages: 4
Assignors
OHASHI, MASAKI
Executed: 2016-06-06
HATAKEYAMA, JUN
Executed: 2016-06-07
FUKUSHIMA, MASAHIRO
Executed: 2016-06-06
FUJIWARA, TAKAYUKI
Executed: 2016-06-06
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Compound, Polymer Compound, Resist Composition, and Patterning Process