Patent Assignment
Reel/Frame 039112/0973
Assignment of Assignor's Interest
Recorded: 2016-07-08
Pages: 7
Assignors
MATSUOKA, TATSURU
Executed: 2016-07-01
HIROSE, YOSHIRO
Executed: 2016-06-23
HASHIMOTO, YOSHITOMO
Executed: 2016-07-01
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.