Patent Assignment
Reel/Frame 039308/0401
Assignment of Assignor's Interest
Recorded: 2016-08-01
Pages: 3
Assignor
LEVINSKI, VLADIMIR
Executed: 2016-06-20
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Properties
(2)
Control of Amplitude and Phase of Diffraction Orders Using Polarizing Targets and Polarized Illumination
Control of Amplitude and Phase of Diffraction Orders Using a Polarizing Targets
Application:
62/264,514 →