Control of Amplitude and Phase of Diffraction Orders Using a Polarizing Targets

Inventor: Vladimir Levinski

Provisional Application Expired

	Code	Description	Pages	PDF
2016-01-28	`APP.FILE.REC`	Filing Receipt	3	View
2015-12-08	`TR.PROV`	Provisional Cover Sheet (SB16)	3	View
2015-12-08	`SPEC`	Specification	5	View
2015-12-08	`WFEE`	Fee Worksheet (SB06)	2	View
2015-12-08	`N417`	Electronic Filing System Acknowledgment Receipt	2	View

Inventors

Vladimir Levinski Migdal HaEmek, ISRAEL

Attorneys & Agents of Record

ELIZABETH MORRIS Reg. 54323 Agent · KLA-TENCOR CORPORATION

KEVIN MCANDREWS Reg. 34496 Agent · KLA - TENCOR CORP.

JEREMY KOSCIELNY Reg. 70672 Attorney · KLA CORPORATION

JUSTIN SPURLOCK Reg. 73658 Attorney · CANTOR COLBURN LLP

Prosecution

KLA-TENCOR CORPORATION

from LEVINSKI, VLADIMIR

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded 2016-08-01

Monitor This Case

Get email alerts when status or documents change.

Order Certified Copies

Most orders are placed with the USPTO same day — all within 24 business hours.

Pre-filled with this application's details

Quick Facts

External Links