Patent Assignment
Reel/Frame 039483/0131
Assignment of Assignor's Interest
Recorded: 2016-08-19
Pages: 4
Assignors
ZHANG, YITING
Executed: 2016-08-11
SRIRAMAN, SARAVANAPRIYAN
Executed: 2016-08-18
PATERSON, ALEX
Executed: 2016-08-18
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Control of on-Wafer Cd Uniformity with Movable Edge Ring and Gas Injection Adjustment