Patent Assignment
Reel/Frame 039683/0280
Assignment of Assignor's Interest
Recorded: 2016-09-09
Pages: 2
Assignors
SHIINA, MASAYUKI
Executed: 2016-07-25
YASUI, NAOKI
Executed: 2016-07-25
ONO, TETSUO
Executed: 2016-07-31
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHIMBASHI 1-CHOME, MINATO-KU,, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.