Patent Assignment
Reel/Frame 039690/0155
Assignment of Assignor's Interest
Recorded: 2016-09-09
Pages: 8
Assignors
USHIDA, TAKURO
Executed: 2016-08-18
KAMAKURA, TSUKASA
Executed: 2016-08-29
HIROSE, YOSHIRO
Executed: 2016-08-18
NAKATANI, KIMIHIKO
Executed: 2016-08-18
Assignee
HITACHI KOKUSAI ELECTRIC INC
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.