Patent Assignment
Reel/Frame 039702/0388
Assignment of Assignor's Interest
Recorded: 2016-09-12
Pages: 5
Assignee
IONQUEST LLC
20 CABOT BOULEVARD, SUITE 300, MANSFIELD, MASSACHUSETTS, 02048
Covered Property
(1)
Capacitive Coupled Plasma Source for Sputtering and Resputtering
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.