Patent Assignment
Reel/Frame 039763/0110
Assignment of Assignor's Interest
Recorded: 2016-09-16
Pages: 3
Assignor
WAKAI, HIDEKI
Executed: 2016-09-13
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Temperature Adjustment Device and Substrate Processing Apparatus