Patent Assignment
Reel/Frame 039778/0196
Merger
Recorded: 2016-08-23
Pages: 5
Assignor
CARL ZEISS SMS GMBH
Executed: 2015-05-12
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method and Apparatus for Correcting Errors on a Wafer Processed by a Photolithographic Mask
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Aug 5, 2016
From: BEYER, DIRK
To: CARL ZEISS SMS GMBH
Reel/Frame 039352/0668 →
Assignment of Assignor's Interest
Aug 5, 2016
From: DMITRIEV, VLADIMIR; SHARONI, OFIR; WERTSMAN, NADAV
To: CARL ZEISS SMS LTD.
Reel/Frame 039352/0767 →
Modifying Conversion
Aug 5, 2016
From: CARL ZEISS SMS GMBH
To: CARL ZEISS SMT GMBH
Reel/Frame 039590/0619 →