Patent Assignment
Reel/Frame 039855/0552
Assignment of Assignor's Interest
Recorded: 2016-09-26
Pages: 5
Assignor
FUJINO, YUTAKA
Executed: 2016-09-14
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing System