Patent Assignment
Reel/Frame 039864/0135
Assignment of Assignor's Interest
Recorded: 2016-09-27
Pages: 4
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Angle Control For Radicals And Reactive Neutral Ion Beams