Assignment of Assignor's Interest

Recorded: 2016-09-30 Pages: 6

Assignors

LEVINSKI, VLADIMIR

Executed: 2016-06-20

PASKOVER, YURI

Executed: 2016-09-28

KANDEL, DANIEL

Executed: 2016-07-19

Assignee

KLA-TENCOR CORPORATION

ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035

Covered Properties (2)

Self-Moire Target Design Principles for Measuring Unresolved Device-Like Pitches

Patent: 9,864,209 →

Application: 15/112,819 →

Publication: US 2017/0146810

Self-Moire Targets for OVL Measurement

Application: 62/163,764 →