Patent Application
Provisional
App. No. 62/163,764
· Confirmation No. 4428
Self-Moire Targets for OVL Measurement
Provisional Application Expired
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 23584
- Docket No.
- P4627
- Confirmation No.
- 4428
Child
Claims priority from a provisional application
→
App. 15/112,819
· US 9,864,209
Filed 2016-07-20
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2016/033323
Filed 2016-05-19
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 15/829,111
· US 10,101,592
Filed 2017-12-01
· Patented Case
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2016-09-30
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Quick Facts
- App. No.
- 62/163,764
- Filed
- 2015-05-19
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