Patent Assignment
Reel/Frame 040016/0821
Assignment of Assignor's Interest
Recorded: 2016-10-14
Pages: 4
Assignors
BASAVALINGAPPA, ADARSH
Executed: 2016-10-05
WANG, PENG
Executed: 2016-10-05
NAGABHIRAVA, BHASKAR
Executed: 2016-10-06
GOSS, MICHAEL
Executed: 2016-10-07
GOPALADASU, PRABHAKARA
Executed: 2016-10-10
KNARR, RANDOLPH
Executed: 2016-10-06
SCHMITZ, STEFAN
Executed: 2016-10-04
FRIDDLE, PHIL
Executed: 2016-10-05
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method for Selectively Etching with Reduced Aspect Ratio Dependence