Patent Assignment
Reel/Frame 040040/0463
Assignment of Assignor's Interest
Recorded: 2016-10-18
Pages: 8
Assignors
ISHIKAWA, YOSHIO
Executed: 2016-08-19
ENOMOTO, TAKASHI
Executed: 2016-08-22
OSADA, YUTAKA
Executed: 2016-08-22
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Seasoning Method and Etching Method