Patent Assignment
Reel/Frame 040066/0259
Assignment of Assignor's Interest
Recorded: 2016-10-19
Pages: 12
Assignors
SUGIURA, SHINOBU
Executed: 2016-10-06
KUWATA, YOSUKE
Executed: 2016-10-06
MIYASHITA, TOMOYASU
Executed: 2016-10-06
UMEKAWA, ATSUSHI
Executed: 2016-10-11
KIMURA, KAZUHIRO
Executed: 2016-10-11
HIRATSUKA, AKIHIKO
Executed: 2016-09-21
KATAOKA, KAORU
Executed: 2016-09-21
ARAI, RYOSUKE
Executed: 2016-09-21
Assignees
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
TOKYO TECHNOLOGICAL LABO CO., LTD.
2-16-6 KURIHIRA, ASAO-KU, KAWASAKI-SHI, KANAGAWA, 215-0031, JAPAN
Covered Property
(1)
Heating Part, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.