Patent Assignment
Reel/Frame 040123/0503
Assignment of Assignor's Interest
Recorded: 2016-10-25
Pages: 5
Assignors
SHIU, JUNG-HAU
Executed: 2016-06-29
KO, CHUNG-CHI
Executed: 2016-06-28
LEE, TZE-LIANG
Executed: 2016-06-28
PENG, YU-YUN
Executed: 2016-06-29
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method for Preventing Bottom Layer Wrinkling in a Semiconductor Device