Patent Assignment
Reel/Frame 040210/0932
Assignment of Assignor's Interest
Recorded: 2016-11-03
Pages: 2
Assignor
NOMURA, HARUYUKI
Executed: 2016-10-27
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHINSUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI, KANAGAWA, 235-8522, JAPAN
Covered Property
(1)
Method for Acquiring Parameter for Dose Correction of Charged Particle Beam, Charged Particle Beam Writing Method, and Charged Particle Beam Writing Apparatus