Patent Assignment
Reel/Frame 040373/0071
Assignment of Assignor's Interest
Recorded: 2016-11-18
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Graphene Pellicle For Extreme Ultraviolet Lithography