Patent Assignment
Reel/Frame 040427/0134
Assignment of Assignor's Interest
Recorded: 2016-11-28
Pages: 3
Assignors
TAKAYAMA, WATARU
Executed: 2016-11-15
TOMINAGA, SHO
Executed: 2016-11-15
IGARASHI, YOSHIKI
Executed: 2016-11-15
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Etching Method