Plasma etching method
There is provided a plasma etching method. The plasma etching method includes generating plasma, by using a first high frequency power output from a first high frequency power supply, from a first processing gas that contains fluorine-containing gas, thereby etching a laminated film of a silicon oxide film and a silicon nitride film through the generated plasma, and generating plasma, by using the first high frequency power, from a second processing gas that contains bromine-containing gas, thereby etching the laminated film through the generated plasma.
1. A plasma etching method comprising:
generating a first plasma from a first processing gas that contains fluorine-containing gas and hydrogen-containing gas, by using a first radio frequency power that is output from a first radio frequency power supply,
etching a laminated film consisting of alternating layers of at least one silicon oxide film layer and at least one silicon nitride film layer, with the first plasma; and
generating a second plasma from a second processing gas that contains HBr gas, by using the first radio frequency power, and
etching the laminated film with the second plasma to remove unevenness at the interface between adjacent silicon oxide and silicon nitride layers of the alternating layers of the at least one silicon oxide film layer and the at least one silicon nitride film layer.
2. The plasma etching method according to claim 1 wherein, unevenness formed at an interface between the silicon oxide film layer and the silicon nitride film layer is removed upon etching the laminated film with the second plasma.
3. The plasma etching method according to claim 1 , wherein the first plasma and the second plasma are generated when a temperature of the laminated film is equal to or less than −30° C.
4. The etching method according to claim 1 , wherein the second processing gas is generated by adding the bromine-containing gas to the first processing gas.
5. The plasma etching method according to claim 1 , wherein the second processing gas is generated by adding bromine-containing gas to a processing gas, which processing gas is different from the first processing gas.
6. The plasma etching method according to claim 1 , wherein
in generating the second plasma, a second radio frequency power that is output from a second radio frequency power supply is applied in synchronization with the first radio frequency power, a frequency of the second radio frequency power being lower than a frequency of the first radio frequency power.
7. The plasma etching method according to claim 6 , wherein in generating the second plasma, the second radio frequency power greater than the first radio frequency power is applied.
8. The plasma etching method according to claim 1 , wherein the fluorine-containing gas is CF 4 and the hydrogen-containing gas is H 2 .