Patent Assignment
Reel/Frame 040493/0135
Assignment of Assignor's Interest
Recorded: 2016-12-02
Pages: 6
Assignee
HITACHI KOKUSAI ELECTRIC INC
15-12, NISHI-SHIMBASHI 2-CHOME, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Substrate Processing Apparatus
Application:
15/366,697 →
Publication:
US 2017/0159181
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.