Patent Assignment
Reel/Frame 040671/0803
Assignment of Assignor's Interest
Recorded: 2016-11-22
Pages: 2
Assignor
HABETS, BORIS
Executed: 2012-02-08
Assignee
QONIAC GMBH
FETSCHERSTRASSE 72, DRESDEN, 01307, GERMANY
Covered Property
(1)
Method and Apparatus for Fabricating Wafer By Calculating Process Correction Parameters