Method and apparatus for fabricating wafer by calculating process correction parameters
A method of calculating an overlay correction model in a unit for the fabrication of a wafer is disclosed. The method comprises measuring overlay deviations of a subset of first overlay marks and second overlay marks by determining the differences between the subset of first overlay marks generated in the first layer and corresponding ones of the subset of second overlay marks generated in the second layer.
1. An apparatus for fabrication of a wafer with a structural pattern comprising:
an exposure tool for exposure of the wafer;
an overlay measurement tool for measuring a subset of overlay deviations between lower first overlay marks and second overlay marks in a photoresist layer on the wafer; and
a process correction unit connected to the overlay measurement tool, wherein the process correction unit is configured to:
accept the measured subset of overlay deviations,
calculate from the overlay deviations wafer fine model corrections parameters,
for a plurality of overlay positions estimate overlay residuals from the wafer fine model correction parameters, and calculate a set of field correction parameters for the exposure tool from the overlay residuals, and
provide the wafer fine model correction parameters and the set of field correction parameters to the exposure tool.