Patent Assignment
Reel/Frame 040698/0834
Assignment of Assignor's Interest
Recorded: 2016-12-09
Pages: 3
Assignor
KUMAGAI, TAKESHI
Executed: 2016-11-25
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Deposition Method and Film Deposition Apparatus