Patent Assignment
Reel/Frame 040904/0545
Assignment of Assignor's Interest
Recorded: 2017-01-09
Pages: 6
Assignor
HIROCHI, YUKITOMO
Executed: 2015-09-21
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.