Patent Assignment
Reel/Frame 041000/0579
Assignment of Assignor's Interest
Recorded: 2017-01-13
Pages: 3
Assignors
DESILVA, EKMINI A.
Executed: 2017-01-13
PETRILLO, KAREN E.
Executed: 2017-01-13
SESHADRI, INDIRA P.
Executed: 2017-01-13
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Approach to Lowering Extreme Ultraviolet Exposure Dose for Inorganic Hardmasks for Extreme Ultraviolet Patterning
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.