Patent Assignment
Reel/Frame 046326/0090
Corrective Assignment to Correct the First Assignor's Name to Ekmini a. De Silva Previously Recorded on Reel 041000 Frame 0579. Assignor(S) Hereby Confirms the Assignment.
Recorded: 2018-06-08
Pages: 6
Assignors
DE SILVA, EKMINI A.
Executed: 2017-01-13
PETRILLO, KAREN E.
Executed: 2017-01-13
SESHADRI, INDIRA P.
Executed: 2017-01-13
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Approach to Lowering Extreme Ultraviolet Exposure Dose for Inorganic Hardmasks for Extreme Ultraviolet Patterning
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.