Patent Assignment
Reel/Frame 041006/0983
Assignment of Assignor's Interest
Recorded: 2017-01-18
Pages: 6
Assignors
KOOLEN, ARMAND EUGENE ALBERT
Executed: 2016-01-12
SHMAREV, YEVGENIY KONSTANTINOVICH
Executed: 2016-01-07
SMIRNOV, STANISLAV
Executed: 2016-01-07
TSENG, CHIEN-HUNG
Executed: 2016-01-07
Assignees
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, NL-5500 AH, NETHERLANDS
ASML HOLDING N.V.
P.O. BOX 324, VELDHOVEN, NL-5500 AH, NETHERLANDS
Covered Property
(1)
Method and Device for Focusing in an Inspection System