Patent Assignment
Reel/Frame 041030/0582
Assignment of Assignor's Interest
Recorded: 2017-01-20
Pages: 3
Assignors
WU, XIAOWEI
Executed: 2017-01-19
FENWICK, DAVID
Executed: 2017-01-19
SUN, JENNIFER Y.
Executed: 2017-01-19
ZHAN, GUODONG
Executed: 2017-01-20
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Multi-Layer Plasma Resistant Coating by Atomic Layer Deposition