Patent Assignment
Reel/Frame 041090/0482
Assignment of Assignor's Interest
Recorded: 2017-01-26
Pages: 3
Assignors
PANDEY, NITESH
Executed: 2015-10-08
ZHOU, ZILI
Executed: 2015-10-08
KOOLEN, ARMAND EUGENE ALBERT
Executed: 2015-10-08
VAN DER ZOUW, GERBRAND
Executed: 2015-10-09
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Metrology Method and Apparatus, Computer Program and Lithographic System