Patent Assignment
Reel/Frame 041093/0782
Assignment of Assignor's Interest
Recorded: 2017-01-26
Pages: 7
Assignors
PARK, KEUM SEOK
Executed: 2016-12-15
KIM, SUN JUNG
Executed: 2016-12-14
KIM, YI HWAN
Executed: 2016-12-14
PARK, PAN KWI
Executed: 2016-12-14
SHIN, DONG SUK
Executed: 2016-12-14
YU, HYUN KWAN
Executed: 2016-12-14
LEE, SEUNG HUN
Executed: 2016-12-14
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Precleaning Apparatus and Substrate Processing System