Patent Assignment
Reel/Frame 041155/0942
Assignment of Assignor's Interest
Recorded: 2017-02-02
Pages: 5
Assignors
MIYAMA, RYO
Executed: 2017-01-29
WATANABE, NAOTO
Executed: 2017-01-23
NAKAMURA, KOICHIRO
Executed: 2017-01-23
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Stability Determination Method and Plasma Processing Apparatus