Patent Assignment
Reel/Frame 041163/0795
Assignment of Assignor's Interest
Recorded: 2017-02-03
Pages: 4
Assignors
ANGELOV, IVELIN
Executed: 2017-01-31
SILADIE, CRISTIAN
Executed: 2017-02-01
LARSON, DEAN
Executed: 2017-01-31
SEVERSON, BRIAN
Executed: 2017-01-31
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Variable Depth Edge Ring for Etch Uniformity Control