Patent Assignment
Reel/Frame 041220/0638
Assignment of Assignor's Interest
Recorded: 2017-02-10
Pages: 5
Assignors
EASON, KWAME
Executed: 2017-02-07
CARON, JAMES EUGENE
Executed: 2017-02-07
ANGELOV, IVELIN
Executed: 2017-02-02
PARK, JOON HONG
Executed: 2017-02-03
YANG, DENGLIANG
Executed: 2017-02-06
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
System and Method for Increasing Electron Density Levels in a Plasma of a Substrate Processing System