Patent Assignment
Reel/Frame 041253/0794
Assignment of Assignor's Interest
Recorded: 2017-02-14
Pages: 4
Assignors
AOMATSU, AKIYOSHI
Executed: 2015-07-23
UEMAE, SHOJI
Executed: 2015-07-23
NAKAMURA, KAZUKI
Executed: 2015-07-24
IZUMI, YOSHINORI
Executed: 2015-07-23
TANAHASHI, NOBUTAKA
Executed: 2015-07-23
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Treatment Apparatus, and Substrate Treatment Method