Patent Assignment
Reel/Frame 041264/0782
Assignment of Assignor's Interest
Recorded: 2017-02-15
Pages: 4
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Method to Improve Adhesion of Photoresist on Silicon Substrate for Extreme Ultraviolet and Electron Beam Lithography
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.