Patent Assignment
Reel/Frame 041372/0266
Assignment of Assignor's Interest
Recorded: 2017-02-24
Pages: 2
Assignee
LASERTEC CORPORATION
2-10-1 SHIN-YOKOHAMA, KOHOKU-KU, YOKOHAMA, 222-8552, JAPAN
Covered Property
(1)
Inspection Apparatus of Euv Mask and Its Focus Adjustment Method