Patent Assignment
Reel/Frame 041394/0968
Assignment of Assignor's Interest
Recorded: 2017-02-28
Pages: 5
Assignor
TAKEDA, TSUYOSHI
Executed: 2017-02-23
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.