Patent Assignment
Reel/Frame 041416/0055
Assignment of Assignor's Interest
Recorded: 2017-03-01
Pages: 3
Assignor
MARUYAMA, HIROTAKA
Executed: 2017-02-21
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Liquid Processing Method, Substrate Processing Apparatus, and Storage Medium