Liquid processing method, substrate processing apparatus, and storage medium
In drying a substrate disposed inside a processing container after performing a liquid processing on the substrate, a low humidity gas for lowering a humidity inside the processing container is supplied during a time period when a processing liquid is supplied to the center portion of the substrate, and the processing liquid supplied to the center portion of the substrate is stopped after a humidity measurement value obtained by measuring the humidity inside the processing container becomes equal to or less than a preset humidity target value.
1. A liquid processing method for performing a liquid processing on a substrate disposed inside a processing container, and then, drying the substrate, the method comprising:
a processing liquid supplying step of performing a liquid processing by supplying a processing liquid to a center portion of the substrate inside the processing container;
a low humidity gas supplying step of supplying a low humidity gas for lowering a humidity inside the processing container, into the processing container during a time period when the processing liquid is supplied to the substrate; and
a drying step of removing the processing liquid on the substrate and drying the substrate,
wherein the drying step is started after a humidity measurement value obtained by measuring the humidity inside the processing container becomes equal to or less than a preset humidity target value.
2. The liquid processing method of claim 1 , wherein the drying step is started by stopping the supply of the processing liquid to the center portion of the substrate.
3. The liquid processing method of claim 1 , wherein a switching timing of the processing liquid supplying step and the drying step is preset, and the processing liquid supplying step is switched to the drying step when the humidity measurement value becomes equal to or less than the preset humidity target value at the switching timing.
4. The liquid processing method of claim 1 , wherein a switching timing of the processing liquid supplying step and the drying step is preset, the processing liquid supplying step is not switched to the drying step when the humidity measurement value does not become equal to or less than the preset humidity target value at the switching timing, and the processing liquid supplying step is continued.
5. The liquid processing method of claim 4 , wherein when the humidity measurement value becomes equal to or less than the preset humidity target value after the processing liquid supplying step is continued, the processing liquid supplying step is switched to the drying step.
6. The liquid processing method of claim 4 , wherein when the humidity measurement value does not become equal to or less than the preset humidity target value after a preset time lapses from the time when the processing liquid supplying step is continued, the processing liquid supplying step is switched to the drying step, and an alarm is generated to a device performing the liquid processing.
7. The liquid processing method of claim 1 , wherein when the humidity measurement value becomes equal to or less than the preset humidity target value during the processing liquid supplying step, the processing liquid supplying step is switched to the drying step.
8. The liquid processing method of claim 1 , wherein a switching timing of the processing liquid supplying step and the drying step is preset, and the processing liquid supplying step is switched to the drying step when the humidity measurement value becomes equal to or less than the preset humidity target value during the processing liquid supplying step which precedes the switching timing.
9. The liquid processing method of claim 3 , wherein a timing for starting a supply of the low humidity gas in the low humidity gas supplying step is set by determining, in advance, an estimated time from the start of the supply of the low humidity gas to the processing container until a target value reaching timing obtained by estimating when the humidity measurement value becomes equal to or less than the humidity target value, and counting the estimated time backward from the target value reaching timing, and the target value reaching timing is set to precede the switching timing.
10. The liquid processing method of claim 4 , wherein a timing for starting a supply of the low humidity gas in the low humidity gas supplying step is set by determining, in advance, an estimated time from the start of the supply of the low humidity gas to the processing container until a target value reaching timing obtained by estimating when the humidity measurement value becomes equal to or less than the humidity target value, and counting the estimated time backward from the target value reaching timing, and the target value reaching timing is set to precede the switching timing.
11. The liquid processing method of claim 1 , wherein the supply of the processing liquid is performed on the substrate held horizontally and rotating around a vertical axis, and a measurement of the humidity inside the processing container is performed at a position radially outside the rotating substrate.
12. A non-transitory computer readable storage medium that stores a computer executable program for use in a substrate processing apparatus of performing a liquid processing on a substrate,
wherein the computer executable program includes a step group organized to, when executed, causes a computer to execute the liquid processing method of claim 1 .