Patent Assignment
Reel/Frame 041435/0166
Assignment of Assignor's Interest
Recorded: 2017-03-02
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Trench Liner for Removing Impurities in a Non-Copper Trench