Patent Assignment
Reel/Frame 041536/0219
Assignment of Assignor's Interest
Recorded: 2017-03-10
Pages: 5
Assignors
AMANO, YOSHIFUMI
Executed: 2017-02-21
MORITA, SATOSHI
Executed: 2017-02-21
IKEBE, RYOJI
Executed: 2017-02-21
MIYAMOTO, ISAMU
Executed: 2017-02-21
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Processing Method of Substrate Processing Apparatus