Patent Assignment
Reel/Frame 041553/0884
Assignment of Assignor's Interest
Recorded: 2017-03-13
Pages: 7
Assignors
HASHIMOTO, YOSHITOMO
Executed: 2017-03-09
HIROSE, YOSHIRO
Executed: 2017-02-17
MATSUOKA, TATSURU
Executed: 2017-03-09
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.