Patent Assignment
Reel/Frame 041639/0288
Assignment of Assignor's Interest
Recorded: 2017-03-20
Pages: 5
Assignors
MURAMATSU, MAKOTO
Executed: 2017-03-06
TOMITA, TADATOSHI
Executed: 2017-02-28
GENJIMA, HISASHI
Executed: 2017-03-06
YOU, GEN
Executed: 2017-03-06
KITANO, TAKAHIRO
Executed: 2017-03-14
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
SUBSTRATE TREATMENT METHOD using a block copolymer containing a hydrophilic and a hydrophobic polymers