Patent Assignment
Reel/Frame 041663/0181
Assignment of Assignor's Interest
Recorded: 2017-03-21
Pages: 3
Assignors
HASHIMOTO, YOSHITOMO
Executed: 2017-02-23
TAKASAWA, YUSHIN
Executed: 2017-02-27
NAGATO, MASAYA
Executed: 2017-02-23
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME, MINATO-KU, TOKYO, 1058039, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.