Patent Assignment
Reel/Frame 041765/0336
Assignment of Assignor's Interest
Recorded: 2017-03-28
Pages: 3
Assignee
MITSUBISHI GAS CHEMICAL COMPANY, INC.
5-2, MARUNOUCHI 2-CHOME, CHIYODA-KU, TOKYO, 100-8324, JAPAN
Covered Property
(1)
Semiconductor Element Cleaning Solution That Suppresses Damage to Cobalt, and Method for Cleaning Semiconductor Element Using Same